What purpose

Overview

The XSP-3 uses an XScope system with automatized Y axis with manual Z axis to measure color & luminance information of the DUT. 

  • High magnification and ultra large field of view
  • Spatial resolution of 1.5µm
  • Automatic focus and tilt correction
  • gSOAP toolkit, innovative multi-OS software development platform

  • Micro display inspection
  • Detailed pixel sub-structure studies
  • LEDs die inspection
  • Any photometry application down to the micrometer scales

MORE DETAILS

TECHNICAL FEATURES

SpecificationsXSP-3
Spatial resolution1.5μm
Magnification4.5
FOV10.9x8.2mm
Sensor50 Mpix
High speed sensorYes
Measurement**<2s / pattern
Spectral technologySpectrometer
Spectral resolution2nm
Luminance by pixelNo
Spectrum by pixelNo
Spectrum by displayYes
AutofocusYes
Automatic tilt correctionYes
X automatedYes
X range300mm
Y automatedNo
Y rangeFixed
Z automatedManual
Z range50mm
Sample holderOption
Frame grabberYes
Data formatXML
ProgrammingSOAP based
Operating systemOIS, Windows, Linux, UNIX
AnalysisSDK provided
Height1100mm
Width520mm
Specifications can be changed without notice

Sizes & plan

Dimensions

want more ?

Other Uniformity products