Uniformity
XSP-4
The XSP-4 is designed to measure several positions along the XY axis of 1 or several DUTs.
It is an equipment which does spectral measurements with a very precise spectrometer at a spatial resolution of 1.5µm.
What purpose
Overview
The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution.
- High magnification and ultra-large field of view
- Spatial resolution of 1.5µm
- Automatic focus and tilt correction
- gSOAP toolkit, innovative multi-OS software development platform
- Micro display inspection
- Detailed pixel sub-structure studies
- LEDs die inspection
- Any photometry application down to the micrometer scales
Sizes & plan
Dimensions

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Other Uniformity products
XSP-3
The XSP-3 was designed to measure several positions along an X axis of 1 or several DUTs. It is a very fast equipment which provides spectral measurements with a spatial resolution of 1.5µm.
Learn more ›XSCOPE
The Xscope has been designed specifically to assess the quality of Micro Displays with very precise uniformity measurements at the pixel level.
Learn more ›