Uniformity
XSP-4

The XSP-4 is designed to measure several positions along the XY axis of 1 or several DUTs.
It is an equipment which does spectral measurements with a very precise spectrometer at a spatial resolution of 1.5µm.
What purpose
Overview
The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution.
- High magnification and ultra-large field of view
- Spatial resolution of 1.5µm
- Automatic focus and tilt correction
- gSOAP toolkit, innovative multi-OS software development platform
- Micro display inspection
- Detailed pixel sub-structure studies
- LEDs die inspection
- Any photometry application down to the micrometer scales


MORE DETAILS
TECHNICAL FEATURES
Specifications | XSP-4 |
---|---|
Spatial resolution | 1.5μm |
Magnification | 3.37 |
FOV | 10.8x8.2mm |
Sensor | 47.5 Mpix |
High speed sensor | Yes |
Measurement** | <5mn / pattern |
Spectral technology | Bandpass filters |
Spectral resolution | 5nm |
Luminance by pixel | Yes |
Spectrum by pixel | Yes |
Spectrum by display | Yes |
Autofocus | Yes |
Automatic tilt correction | Yes |
X automated | Yes |
X range | 300mm |
Y automated | Yes |
Y range | 100mm |
Z automated | Yes |
Z range | 50mm |
Sample holder | Option |
Frame grabber | Yes |
Data format | XML |
Programming | SOAP based |
Operating system | OIS, Windows, Linux, UNIX |
Analysis | SDK provided |
Height | 1100mm |
Width | 520mm |
Specifications can be changed without notice |
Sizes & plan
Dimensions

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