What purpose

Overview

The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution. 

  • High magnification and ultra-large field of view
  • Spatial resolution of 1.5µm
  • Automatic focus and tilt correction
  • gSOAP toolkit, innovative multi-OS software development platform

  • Micro display inspection
  • Detailed pixel sub-structure studies
  • LEDs die inspection
  • Any photometry application down to the micrometer scales

MORE DETAILS

TECHNICAL FEATURES

SpecificationsXSP-4
Spatial resolution1.5μm
Magnification3.37
FOV10.8x8.2mm
Sensor47.5 Mpix
High speed sensorYes
Measurement**<5mn / pattern
Spectral technologyBandpass filters
Spectral resolution5nm
Luminance by pixelYes
Spectrum by pixelYes
Spectrum by displayYes
AutofocusYes
Automatic tilt correctionYes
X automatedYes
X range300mm
Y automatedYes
Y range100mm
Z automatedYes
Z range50mm
Sample holderOption
Frame grabberYes
Data formatXML
ProgrammingSOAP based
Operating systemOIS, Windows, Linux, UNIX
AnalysisSDK provided
Height1100mm
Width520mm
Specifications can be changed without notice

Sizes & plan

Dimensions

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