Uniformity
XSP-4
The XSP-4 is designed to measure several positions along the XY axis of 1 or several DUTs.
It is an equipment which does spectral measurements with a very precise spectrometer at a spatial resolution of 1.5µm.
What purpose
Overview
The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution.
- High magnification and ultra-large field of view
- Spatial resolution of 1.5µm
- Automatic focus and tilt correction
- gSOAP toolkit, innovative multi-OS software development platform
- Micro display inspection
- Detailed pixel sub-structure studies
- LEDs die inspection
- Any photometry application down to the micrometer scales
MORE DETAILS
TECHNICAL FEATURES
| Specifications | XSP-4 |
|---|---|
| Spatial resolution | 1.5μm |
| Magnification | 3.37 |
| FOV | 10.8x8.2mm |
| Sensor | 47.5 Mpix |
| High speed sensor | Yes |
| Measurement** | <5mn / pattern |
| Spectral technology | Bandpass filters |
| Spectral resolution | 5nm |
| Luminance by pixel | Yes |
| Spectrum by pixel | Yes |
| Spectrum by display | Yes |
| Autofocus | Yes |
| Automatic tilt correction | Yes |
| X automated | Yes |
| X range | 300mm |
| Y automated | Yes |
| Y range | 100mm |
| Z automated | Yes |
| Z range | 50mm |
| Sample holder | Option |
| Frame grabber | Yes |
| Data format | XML |
| Programming | SOAP based |
| Operating system | OIS, Windows, Linux, UNIX |
| Analysis | SDK provided |
| Height | 1100mm |
| Width | 520mm |
| Specifications can be changed without notice | |
Sizes & plan
Dimensions
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