What purpose


The XSP-4 uses an XScope system with automated XYZ axis to measure spectral information of the DUT. This system allows spectral measurements with a 5 nm resolution. 

  • High magnification and ultra-large field of view
  • Spatial resolution of 1.5µm
  • Automatic focus and tilt correction
  • gSOAP toolkit, innovative multi-OS software development platform

  • Micro display inspection
  • Detailed pixel sub-structure studies
  • LEDs die inspection
  • Any photometry application down to the micrometer scales

Sizes & plan


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